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Singapore GeBIZ tender · NST000ETT25000076

PROVISION OF ONE (1) OR TWO (2) UNIT OF CLUSTER ETCHING SYSTEM WHICH CAN PERFORM DIELECTRIC ETCH, SI ETCH, METAL ETCH, P

Agency for Science, Technology and Research tender for Education, worth S$5.9M, published in January 2026.

23 Jan 2026
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S$5.9M
Contract value

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Contract description

PROVISION OF ONE (1) OR TWO (2) UNIT OF CLUSTER ETCHING SYSTEM WHICH CAN PERFORM DIELECTRIC ETCH, SI ETCH, METAL ETCH, POST METAL ETCH PHOTORESIST STRIP AND PLASMA BEVEL ETCH (OPTIONAL).

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